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Slide 89 of 241
Current Control Plans & FMEAs
A Technology/Family Control Plan / Device FMEA follows an entire flow for a ‘technology’ through a defined entity. This is in contrast with a ‘process’ flow where there is an individual Control Plan for each piece of equipment or a manufacturing ‘cell’ (company definition). A ‘Technology’ consists of many similar devices.
‘Receiving’ in FAB FMEAs consists of what the FAB looks at when materials arrive. Received materials, such as gasses, liquid chemicals and related materials must be addressed. Registrar interpretation Q5 1/12 (AEC-A100): “So in effect, supplier's control plans will include wafers, gases, and chemicals.”
Device FMEA / Technology / Family Control Plan’ = a flow of a ‘technology’ or ‘device’
Process FMEA covers an ‘equipment set’ or ‘cost block’
Recommended by the FMEA Team
FAB or Other Manufacturing Entity
Machine or Cell 1
‘Receiving’
Machine or Cell 2
Machine or Cell 3
‘Pack
& Ship’
Internal or External
Customer
‘Receiving’
‘Pack
& Ship’
Covers entire flow while product is under the control of the FAB including return of the product (if return is applicable)
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